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PV02200 - SEMI PV22 - 太陽光電池用シリコンウェーハの仕様 Revision:SEMI PV22-1011 - Superseded The glass substrate is in

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The glass substrate is in shape of a wafer (round) or a panel (square or rectangular)

Its quality is determined in a gaseous phase

and installation of equipment

this document has a limited scope as specified in § 2

PV02200 - SEMI PV22 - 太陽光電池用シリコンウェーハの仕様 Revision:SEMI PV22-1011 - Superseded The glass substrate is inglobal Photovoltaic Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org (PV) Referenced SEMI Standards SEMI M35 Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection SEMI M44 Guide to Conversion Factors for Interstitial Oxygen in Silicon SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems Using Depositions of Monodisperse Polystyrene Latex

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