E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control where a 450 FOUP and

where a 450 FOUP and 450 MAC can be loaded and unloaded

SEMI C54 — Specification and Guide for Oxygen

orgで入手可能となる。前版は2014年4月に出版された。

メッセージ交換は，トランザクションプロトコルと呼ばれる手順により実行される。SECS-IIを採用する装置に対しては，このトランザクションプロトコル上からの最小限の要求がある。

E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control where a 450 FOUP andThe purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113. This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and