E03400 - SEMI E34 - マスフローデバイス返還のためのガイドライン StdPbc-0212 This method is not suitable
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Description
This method is not suitable for direct sampling from high pressure cylinders at pressures above 8 × 105 Pa (8 atmospheres)
The scope of this Document is a grade of 50% sodium hydroxide solution used in the semiconductor industry
SEMI E134-0319 (technical revision)
particularly in welded components or tubing exposed to corrosive gases with moisture present
E03400 - SEMI E34 - マスフローデバイス返還のためのガイドライン StdPbc-0212 This method is not suitableNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards None.
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