F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Specifications and analytical procedures are

Specifications and analytical procedures are introduced for each type

Reactive gases shall not be used as they may react chemically with moisture

1  The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards

SEMI C96-0618 (first published)

F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Specifications and analytical procedures areSemiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This Specification defines the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment. This Specification strikes a balance between voltage sag immunity and increased equipment cost. This Specification sets minimum