E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Revision:SEMI E146-0306 - Inactive 環境，健康，安全（EHS）に関する熟達度の必要最低限レベルを実証するために必要な特定の学習目標を確立すること。

環境，健康，安全（EHS）に関する熟達度の必要最低限レベルを実証するために必要な特定の学習目標を確立すること。

This Practice is intended for use with all silicon wafer sizes and types when measuring uniformity of film properties and characteristics

This Test Method can be used for silicon feedstock irrespective of all dopant species and concentrations

SEMI C33-0301 (technical revision)

E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Revision:SEMI E146-0306 - Inactive 環境，健康，安全（EHS）に関する熟達度の必要最低限レベルを実証するために必要な特定の学習目標を確立すること。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing. The particulate contamination