F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods which denotes small areas of

which denotes small areas of imperfection of the otherwise flat wafer or substrate

concerned with management of the availability of qualified factory personnel

SEMI E22-91 (first published)

macroscopic defects such as chips

F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 StdTpc-Package Test Methods which denotes small areas ofNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeNorth American Facilities Committee2002829 North American Regional Standards Committee20029www. semi. org2002111995 1 Referenced SEMI Standards None.