E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The purpose of this Document

The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry

This Standard presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor

This Standard does not define the data contained within a message

本スタンダードは，直径450　mmのウェーハおよびクラスターツールモジュールの間のインタフェースにのみ適用される。例外として搬送モジュールは，インタフェース面を越えて操作されるがゆえにプロセスモジュール内のウェーハ搬送面の定義が必要となる。

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded The purpose of this DocumentThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions