P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes Traceability Requirements

Traceability Requirements

이 문서(Document)는 내부 버퍼 장비의 캐리어 전송뿐만 아니라

1  This version of the Specification applies to the substrate types: wafers

for which Instrumental Neutron Activation Analysis (INAA) is one method of choice

P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes Traceability RequirementsThis guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain