E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded Wafer Manufacturing

Wafer Manufacturing

5 range) and describes analytical techniques using gas phase analysis

Repeatability

those defined in ANSI/ESD S20

E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded Wafer ManufacturingThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)