S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdTpc-Fire Safety which can be accurately imaged

which can be accurately imaged using an optical interferometer (also called an interferometric microscope) or comparable instrument with the capability of obtaining topographical 2D data traces

Current edition approved by the Japanese Regional Standards Committee on July 23

devices that may classify a process endpoint by determining the size and count of particles in the process environment

Behavior and Services (OSS)

S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdTpc-Fire Safety which can be accurately imagedThis Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published 1995; previously published March 2006. NOTICE: This Document was reapproved with minor editorial changes. NOTICE: This Standard or Safety Guideline