E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded SEMI M9 — Specification for

SEMI M9 — Specification for Polished Monocrystalline Gallium Arsenide Slices

Figures 1 and 2 show examples of types of AMHS equipment

such as pellets of perfluoroalkoxy (PFA)

SEMI C27 — Specifications and Guidelines for Hydrochloric Acid

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded SEMI M9 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)