E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded Knowledge of near-edge geometrical properties

Knowledge of near-edge geometrical properties can help the producer and consumer determine if the dimensional characteristics of a specimen wafer satisfy given geometrical requirements

The flexibility provided by the GEM Standard also enables device manufacturers to implement unique automation solutions within a common industry framework

This Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded Knowledge of near-edge geometrical propertiesThis Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document