E06900 - SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers StdVol-Equipment Automation Software 5 — Guide for the

5 — Guide for the Design of Ultrahigh Purity Solvent Distribution Systems with Non-Metallic Fluid Paths in Semiconductor Manufacturing Equipment

orgで，そして2006年3月にCD-ROMで入手可能となる。

This Guide applies to virgin HPIX resin as well as point of use HPIX modules intended for use in semiconductor manufacturing equipment and their ancillary equipment

*If you have more than 500 employees

E06900 - SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers StdVol-Equipment Automation Software 5 — Guide for theNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Document is to provide a standardized method to quantify the reproducibility and zero drift of a thermal mass flow controller (MFC). The intent of this Document is not to suggest any specific testing