Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-256245 (normative)

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Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-256245 (normative)What is BS EN 62047 21 Poisson's ratio of thin film MEMS materials about? BS EN 62047 21 is the 21st part of an international standard used for semiconductor devices. BS EN 62047 21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin film micro electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 m. Who is BS EN